点衍射激光干涉仪

λ/1000超高精度激光干涉仪!爱沙尼亚Difrotec公司的激光干涉仪是市场上高精度干涉仪的biao杆产品，测量精度可达0.6nm(λ/1000).其biao杆产品D7激光干涉仪采用点衍射技术，主要用于高精度的表面（平面,球面,非球面,自由曲面）检测及透射波前检测。产品参数：PerformanceAccuracy:≤0.6nm/1000)波前RMS重复性:≤0.23nm(/2800)Acquisitiontime:10毫秒OpticalSystemclearnumericalaperture(NA):0.6(F#0.83)Systemimagingnumericalaperture(NA):0.55(F#0.91)Imagezoomsystem:4xopticalzoomcontrolledbysoftwareinterfaceImaging:Coherent(nodiffuserglass)withartifactsremovaloptionCCDcamera:0.5kx0.5k(optional:1kx1k,2kx2kor5kx5k)Heightresolution:λ/8000像素深度（数字化）:12bits接触时间:40μsminimumSensorpixelresolution:500×500on≥50mmdiameterpartFocuscontrol:MotorizedcontrolledthroughsoftwareinterfaceOpticalfocusrange:±2neters

查看点衍射激光干涉仪全部详情 >>